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Atomic Solutions Sdn Bhd
Atomic Solutions Sdn Bhd (1131223-U)
访客

108 Auto Sputter Coater

28-Oct-2021
108 Auto Sputter Coater
产品已浏览 65

Description:

The 108 Auto Sputter Coater is ideally suited for high quality coating of non-conducting samples for standard SEM imaging. The added functionality of the automatic features enable fine grain coating on a range of samples with a choice of target materials. The automatic purge and leak functions together with the optional MTM-20 High Resolution Thickness Controller offer consistent thickness for optimized conductive coating results. Cool, fine-grain sputtering is achieved with a very efficient low voltage DC magnetron head. The quick change target method allows a range of metals to be used.


Feature:

  • The 108 Auto Sputter Coater offers the choice of fully automated or manual operation. The specifications also include automatic vent (with a choice of vent gas) and argon purge control.

  • In automatic mode, the coater can be controlled in two ways. The digital timer can be used to give repeatable coatings or the MTM-20 High Resolution Thickness Controller (optional) can be used to terminate the sputtering process at the desired thickness. Alternatively, the MTM-10 High Resolution Thickness Monitor (optional) may also be used for manual termination.

  • The digital sputter current control is fully independent of the argon gas pressure in the sputtering chamber to achieve consistent sputtering rates and optimum specimen coverage.

  • The efficient DC magnetron operates on a low voltage for ''ultra-cool'' sputtering to avoid effects on sample surface.

  • Separate electronic valves for leak, purge and vent, coupled with a precise needle valve, ensures quick and easy operation.

  • Quick target change allows for a range of materials used: Au, Au/Pd, Pt, Pt/Pd (Au fitted as standard).

  • The 108 Auto Sputter Coater can be factory fitted or retrofitted at any time with our Prod. No. 93007, MTM-20 High Resolution Thickness Controller (optional).

 
 

Specifications:

Chamber size:

120mm OD x 120mm height (4.75 x 4.75'')

Target:

Au fitted as standard, Au:Pd, Pt, Pt:Pd optional; 57mm dia x 0.1mm thick

Sample table:

Holds 12 SEM pin mounts; Height adjustable through 60mm

Sputter supply:

Microprocessor based, safety interlock, variable, 40mA maximum
Programmable digital control

Sputter head:

Low voltage ''ultra-cool'' planar magnetron
Quick target change
Wrap-around dark-space shield

Analog metering:

Vacuum Atm - 0.001mb

Thickness monitoring:
(optional)

Use automatic terminating MTM-20 High Resolution Thickness Controller
or MTM-10 High Resolution Thickness Monitor (manual terminating)

Control method:

Automatic operation of gas purge and leak functions
Automatic process sequencing
Full manual override
Precision needle valve
Digital timer (0-300 sec) with pause
Automatic vent

Desktop system:

Vacuum pump is mounted on desktop compatible anti-vibration table
All metal integrated coupling system

Requirements

Electrical:

100-120 or 200-240 VAC, 50/60Hz
(specify on order)

Power:

500VA (coater and pumping system #7010 together)

Argon gas:

Purity, min. 99.99%
Working pressure 5-6 psi (0.4 bar)
Hose connection, 6.0mm (1/4'')

 

 

Footprint
 (Height: 280mm)

1. Control unit
2. Vacuum chamber
3. Thickness monitor
4. Rotary pump
5. Anti-vibration base

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总办事处

Atomic Solutions Sdn Bhd (1131223-U)
33-01, Jalan Sagu 18, Taman Daya, 81100 Johor Bahru, Johor, Malaysia.
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电话: +6010-820 9965, +6018-989 9965
传真: +607-362 1965

邮件: info@atomic-solutions.net
网址: https://www.atomic-solutions.net
网址: https://atomic-solutions.net.newpages.com.my/
网址: http://atomic-solutions.net.n.my/

其他办事处

Kuala Lumpur Branch
21-3, Dataran Mutiara, Jalan 7/4, Taman Serdang Jaya, 43300 Seri Kembangan, Selangor, Malaysia.
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电话: +6018-989 9965
传真: +607-362 1965
邮件: info@atomic-solutions.net

Penang Branch
8, 1st Floor, Tingkat Bukit Minyak 9, Taman Bukit Minyak, 14000 Bukit Mertajam, Pulau Pinang, Malaysia.
Google Maps Waze

电话: +6011-3670 9965
电话: +6018-989 9965
传真: +607-362 1965

60189899965
+60189899965
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